School of Industrial and Systems Engineering
Georgia Tech
Virtual Factory Laboratory
 
   
VFL Georgia Tech Affiliations VFL Virtual Library VFL Publications VFL Research Activities VFL Education Activities VFL Industry Involvement VFL Virtual Tour VFL Faculty & Staff VFL Mission Statement
 
   

Virtual Factory Research

 

High Fidelity Virtual Environment (HiFiVE) for 300mm Semiconductor Factories

 

Research imageModern semiconductor factories are capital-intensive, with the new generation of facilities expected to cost in excess of $2 billion each. With such costs, it is critical to design the system so that it achieves better performance, and to do so rapidly. This project is motivated by the lack of modeling tools to facilitate rapid prototyping of high-fidelity factory operation, especially addressing the realistic control logic and architecture that will operate these highly automated systems.

  • Project goals are the following:
    - a realization of virtual factory concept in the application of 300mm wafer fabrication,
    - distributed, web-based simulation platform for modeling, analysis and control,
    - high degree of modeling flexibility and configurability,
    - rapid prototyping through formal discrete-event modeling and simulation.
This project involves collaboration with industry and other universities to study and model next-generation semiconductor factories that will produce 300mm semiconductor wafers. The latest version of the HiFiVE modeling environment has been implemented using Java for behavioral modeling, High Level Architecture (HLA) for distributed and discrete-event simulation, web-based database system, and VRML for three-dimensional animation.

Website: http://hifive1.isye.gatech.edu/

Project Participants

Project Director:
Leon F. McGinnis
Other Faculty:
Spyros Reveliotis, Chen Zhou
Students:
Hansoo Kim (chief architect), SugJe Sohn, Tolga Tezcan, Ke Wang, Ying Wang
Past Participants:
Douglas A. Bodner, Jonghun Park, Hyun Joong Yoon

Acknowledgments

This project has been funded by a grant from the W. M. Keck Foundation.  The investigators would like to acknowledge industry and university partners, whose participation is instrumental to this project's success. These include Arizona State University, Brooks Automation (formerly PRI Automation), the Massachussetts Institute of Technology, and the University of California at Berkeley.

 

VFL Homepage | Information for Lab Users | Facilities
The W. M. Keck Foundation | School of Industrial and Systems Engineering | Georgia Tech Website

Vision | Education | Research | Faculty & Students | Virtual Tour | Virtual Library | Publications
Industry Involvement | GT Affiliations | Hosted Visitors
School of Industrial and Systems Engineering, Copyright 1997-2001. All rights reserved.
Please read the disclaimer.

Questions, problems, or comments? Please use our Contact Form.

Last Updated January 08, 2004